▎ 摘　　要

A method named sacrificial beam is presented to fabricate graphene cantilever devices. The mechanical properties of graphene cantilevers are studied using atomic force microscopy. Graphene cantilever based 2-terminal nano-electro-mechanical systems switches are demonstrated, and their DC characteristics and switch performance are investigated. A 3-terminal switch based on a graphene cantilever is fabricated, and its electrical properties are also studied. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4738891]