• 文献标题:   Direct Growth of Graphene Films on 3D Grating Structural Quartz Substrates for High-Performance Pressure-Sensitive Sensors
  • 文献类型:   Article
  • 作  者:   SONG XF, SUN T, YANG J, YU LY, WEI DC, FANG L, LU B, DU CL, WEI DP
  • 作者关键词:   conformal graphene, grating structured quartz substrate, direct cvd growth, pressuresensitive sensor, wind pressure
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   17
  • DOI:   10.1021/acsami.6b04526
  • 出版年:   2016

▎ 摘  要

Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as prepared graphene on the three-dimensional substrate have been verified by scanning electron microscopy and Raman spectra. This conformal graphene film possesses excellent electrical and optical properties with a sheet resistance of <2000 Omega.sq(-1) and a transmittance of >80% (at 550 nm), which can be attached with a flat graphene film on a poly(dimethylsiloxane) substrate, and then could work as a pressure-sensitive sensor. This device possesses a high-pressure sensitivity of -6.524 kPa(-1) in a low-pressure range of 0-200 Pa. Meanwhile, this pressure-sensitive sensor exhibits super-reliability (>= 5000 cycles) and an ultrafast response time (