• 文献标题:   Facile process to clean PMMA residue on graphene using KrF laser annealing
  • 文献类型:   Article
  • 作  者:   HWANG HJ, LEE Y, CHO C, LEE BH
  • 作者关键词:  
  • 出版物名称:   AIP ADVANCES
  • ISSN:   2158-3226
  • 通讯作者地址:   Gwangju Inst Sci Technol
  • 被引频次:   0
  • DOI:   10.1063/1.5051671
  • 出版年:   2018

▎ 摘  要

Persistent PMMA residue formed during a graphene transfer has been a culprit in the optimization of graphene device performance. We demonstrated a facile process to remove the PMMA residue using pulsed KrF laser annealing system at H-2/Ar ambient. 10min laser annealing at 248nm could remove the PMMA residue as well as the methoxy and carboxyl function groups without causing noticeable damage to the graphene. (c) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).