▎ 摘 要
In this study, we proposed a Base S-type, long-period, fiber grating (Base S-type LPFG) coated with graphene oxide (GO) for sensing relative humidity based on the micro-electro-mechanical systems (MEMS) process and piezoelectric inkjet technology. The single mode optical fiber was etched to three different diameters (37, 42 and 60 mu m) which were evaluated in the Base S-type LPFG. According to the experimental results, the diameter of 37 mu m yielded the best sensitivity. Humidity sensor experiments showed that the Base S-type LPFG exhibited a high humidity sensitivity in a wide range from 20% RH to 80% RH. These experiments were repeated three times and the results showed that the average value of transmission loss sensitivity was -0.1824 dB/% RH and the average linear response had a correlation coefficient of 95.68%. The sensor exhibits good linearity, high stability, and reversibility in a wide working range. Therefore, the proposed graphene oxide-coated Base S-type LPFG humidity sensor has the potential for monitoring the relative humidity.