• 文献标题:   Graphene-Based Ion Sensitive-FET Sensor With Porous Anodic Aluminum Oxide Substrate for Nitrate Detection
  • 文献类型:   Article
  • 作  者:   KIM J, LIU QY, CUI TH
  • 作者关键词:   graphene, substrate, ion, electrode, surface treatment, water pollution, semiconductor device measurement, aao, graphene, isfet, nitrate, selective membrane
  • 出版物名称:   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
  • ISSN:   1057-7157 EI 1941-0158
  • 通讯作者地址:   Univ Minnesota
  • 被引频次:   0
  • DOI:   10.1109/JMEMS.2020.3008048
  • 出版年:   2020

▎ 摘  要

In this paper, we report an ion sensitive field effect transistor (IS-FET) sensor on anodic aluminum oxide (AAO) substrate, which can directly detect nitrate in water without a buffer solution. The free-standing AAO substrate has a highly ordered porous structure, which supports graphene and Au electrodes. The AAO substrate increases the exposed area of graphene in water. We describe the surface structure of the AAO substrate with scanning electron microscopy in each fabrication process. The device structure and mechanism are also explained in the paper. Graphene is used for the sensing material for its sensitivity in response to the surroundings. The nitrate selective membrane is synthesized and applied to the surface of graphene. The performance of the IS-FET sensors is characterized by a semiconductor analyzer. In the results, the performance of the device is significantly enhanced due to the porous structures of AAO. We successfully demonstrate the superior sensitivity and selectivity of the sensors. The detection limit is 0.05 ppm, and the response time is less than 3 seconds. [2020-0131]