• 文献标题:   Improving High-Temperature Energy Storage Performance of Silicon-Integrated Oxide Film Capacitors via Inserting a Graphene Buffer Layer
  • 文献类型:   Article
  • 作  者:   JIN J, MA CAS, HU GL, JIN M, FAN QL, MA CR, LIU M
  • 作者关键词:   energy storage, graphene, silicon substrate, thermal management, thin film capacitor
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106 EI 1558-0563
  • 通讯作者地址:  
  • 被引频次:   3
  • DOI:   10.1109/LED.2021.3087024
  • 出版年:   2021

▎ 摘  要

The demand for high-temperature energy storage capacitors arises to meet the noticeable increase in integration density of electronic devices. In pursuit of optimized energy storage performance at elevated temperatures, 0.85BaTiO(3)- 0.15Bi(Mg0.5Zr0.5)O-3 (BT-BMZ) thin film capacitors were prepared on graphene/silicon substrate in this work. Taking advantage of remarkable lateral heat dissipation ability of graphene, the dielectric breakdown strength has been promoted from 7.14 MV.cm(-1) to 7.97 MV.cm(-1) by inserting a graphene buffer layer at room temperature. Thus, an enhancement in energy storage density is also observed. Notably, the improvement is more significant with temperature increase. The energy storage density of BT-BMZ/graphene/Si is gained 150% to 34.84 J.cm(-3) in comparison to BT-BMZ/Si (13.96 J.cm(-3)) at 125 degrees C. The results reveal that thermal management is an effective way to improve high-temperature energy storage performance of dielectric film capacitors and prove that transferred monolayer graphene is a promising material for heat dissipation of silicon integrated devices.