▎ 摘　　要

This work proposes a surface acoustic wave (SAW) hydrogen sensor based on the decoration of graphene oxide (GO) by palladium nanoparticles on AIN/Si layered structure. A thin decoration of GO by palladium nanoparticles layer is directly coated on the sensor surface as sensing layer. The SAW hydrogen sensor shows higher sensitivity (similar to 9.5 times) and lower cross-sensitivity towards NO2 compared to those based on GO only. The hydrogen sensor has good stability and fast response. The response time and recovery time are both 7 s. The frequency shift of the sensor with hydrogen concentration change is described by a fitting formula. Response mechanism is investigated based on complex impedance spectroscopy at various hydrogen concentration levels.