▎ 摘 要
A micrometer-scale 3-dimensional (3D) cubic container was fabricated using a 3D printer. A graphene layer deposited as a current collector on surface of the 3D cubic container. Subsequently, a thin-film of manganese oxide (MnO2) was electrochemically deposited on one surface of the cubic container as a cathode material for a lithium (Li) battery device. The fabricated microstructure along with the Mn02 thin-film was investigated via the Dual-beam focused ion beam (FIB) cross-sectioning technique. A quantitative material characterization was carried out using X-ray energy dispersive spectroscopy (EDS). Electrochemical tests showed that the discharge capacity of approximately 18 mAhg(-1) was maintained at the discharge rate of 20 mAg(-1). The study described in this paper represents the first step towards the development of energy storage device, which can power the micrometer-scale container for a variety of micro-electro mechanical systems (MEMS) applications.