• 文献标题:   Technique for the Dry Transfer of Epitaxial Graphene onto Arbitrary Substrates
  • 文献类型:   Article
  • 作  者:   CALDWELL JD, ANDERSON TJ, CULBERTSON JC, JERNIGAN GG, HOBART KD, KUB FJ, TADJER MJ, TEDESCO JL, HITE JK, MASTRO MA, MYERSWARD RL, EDDY CR, CAMPBELL PM, GASKILL DK
  • 作者关键词:   epitaxial graphene, transfer, silicon intercalation, hall effect, transparent contact, sic
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851
  • 通讯作者地址:   USN
  • 被引频次:   126
  • DOI:   10.1021/nn901585p
  • 出版年:   2010

▎ 摘  要

To make graphene technologically viable, the transfer of graphene films to substrates appropriate for specific applications is required. We demonstrate the dry transfer of epitaxial graphene (EG) from the C-face of 4H-SiC onto SiO(2), GaN and Al(2)O(3) substrates using a thermal release tape. Subsequent Hall effect measurements illustrated that minimal degradation in the carrier mobility was induced following the transfer process in lithographically patterned devices. Correspondingly, a large drop in the carrier concentration was observed following the transfer process, supporting the notion that a gradient in the carrier density is present in C-face EG, with lower values being observed in layers further removed from the SiC interface. X-ray photoemission spectra collected from EG films attached to the transfer tape revealed the presence of atomic Si within the EG layers, which may indicate the identity of the unknown intrinsic dopant in EG. Finally, this transfer process is shown to enable EG films amenable for use in device fabrication on arbitrary substrates and films that are deemed most beneficial to carrier transport, as flexible electronic devices or optically transparent contacts.