• 文献标题:   High-pressure oxygen annealing of Al2O3 passivation layer for performance enhancement of graphene field-effect transistors
  • 文献类型:   Article
  • 作  者:   KIM YJ, KIM SM, HEO S, LEE H, LEE HI, CHANG KE, LEE BH
  • 作者关键词:   graphene, highpressure annealing, oxygen, fieldeffect transistor
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Gwangju Inst Sci Technol
  • 被引频次:   1
  • DOI:   10.1088/1361-6528/aaa0e2
  • 出版年:   2018

▎ 摘  要

High-pressure annealing in oxygen ambient at low temperatures (similar to 300 degrees C) was effective in improving the performance of graphene field-effect transistors. The field-effect mobility was improved by 45% and 83% for holes and electrons, respectively. The improvement in the quality of Al2O3 and the reduction in oxygen-related charge generation at the Al2O3-graphene interface, are suggested as the reasons for this improvement. This process can be useful for the commercial implementation of graphene-based electronic devices.