• 文献标题:   In Situ Control of CVD Synthesis of Graphene Film on Nickel Foil
  • 文献类型:   Article
  • 作  者:   RYBIN MG, KONDRASHOV II, POZHAROV AS, NGUYEN VC, PHAN NM, OBRAZTSOVA ED
  • 作者关键词:   chemical vapor deposition, foil, graphene, joule heating, nickel, optical absorption spectroscopy
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972 EI 1521-3951
  • 通讯作者地址:   AM Prokhorov Gen Phys Inst
  • 被引频次:   1
  • DOI:   10.1002/pssb.201700414
  • 出版年:   2018

▎ 摘  要

Here we present a detailed study of the chemical vapor deposition (CVD) method used in a real-time regime for graphene film fabrication on nickel foils. Thin films with a wide range of thicknesses (from 3 up to 53 layers and more) have been obtained. A home-made cold-wall chamber for CVD realization is demonstrated in this work. It is supplied with tools for in situ monitoring the temperature-dependent electrical resistance of nickel substrate to obtain a desired number of graphene layers in the sample synthesized. An area of 1 x 1 cm(2) appeared to be covered by graphene. Raman spectroscopy and optical absorption spectroscopy are used to estimate the quality of graphene films fabricated and the graphene layer number.