• 文献标题:   Precise milling of nano-gap chains in graphene with a focused helium ion beam
  • 文献类型:   Article
  • 作  者:   ZHOU YB, MAGUIRE P, JADWISZCZAK J, MURUGANATHAN M, MIZUTA H, ZHANG HZ
  • 作者关键词:   graphene, helium ion microscope, beam induced defect, conductivity tuning, nanogap
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Trinity Coll Dublin
  • 被引频次:   6
  • DOI:   10.1088/0957-4484/27/32/325302
  • 出版年:   2016

▎ 摘  要

A focused helium ion beam was used to introduce nano-sized gap chains in graphene. The effect of beam scanning strategies in the fabrication of the nano-gap chains was investigated. The tuning of graphene conductivity has been achieved by modulating the magnitude and uniformity of the ion dose and hence the morphology of the nano-gap chains. A model based on the site-specific and dose-dependent conductivity was built to understand the tuning of the conductivity, taking into account the nanoscale non-uniformity of irradiation.