▎ 摘　　要

Transfer-free graphene synthesis process utilizing metal agglomeration phenomena was investigated by using carbon films deposited on Ni or Co catalyst metals on SiO2/Si substrates. As a result of metal agglomeration at high temperatures, multilayer graphene films appeared to be formed directly on SiO2 films. The microscopic Raman mapping study revealed that graphene films were preferentially synthesized around areas where metal films disappeared at an early stage of agglomeration, and that they finally covered almost the whole surface. It was also found that the synthesized graphene films tended to have better structural qualities and lower layer numbers with the increase in the starting metal thicknesses regardless of the kinds of catalyst metals. Raman study also showed that they had good two-dimensional uniformity in the structural quality.