• 文献标题:   Ultrahigh conductivity of large area suspended few layer graphene films
  • 文献类型:   Article
  • 作  者:   ROUHI N, WANG YY, BURKE PJ
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Univ Calif Irvine
  • 被引频次:   14
  • DOI:   10.1063/1.4772797
  • 出版年:   2012

▎ 摘  要

Room-temperature (atmospheric-pressure) electrical conductivity measurements of wafer-scale, large-area suspended (few layer) graphene membranes with areas up to 1000 mu m(2) (30 mu m x 30 mu m) are presented. Multiple devices on one wafer can be fabricated with high yield from the same chemical vapor deposition grown graphene sheet, transferred from a nickel growth substrate to large opening in a suspended silicon nitride support membrane. This represents areas two to orders of magnitude larger than prior transport studies on any suspended graphene device (single or few layer). We find a sheet conductivity of similar to 2500 e(2)/h (or about 10 Omega/sq) of the suspended graphene, which is an order of magnitude higher than any previously reported sheet conductance of few layer graphene. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4772797]