▎ 摘　　要

Large-area single-layer graphene can be grown on Cu foil by CVD, but for device applications, the layer must to be transferred onto an insulating substrate. As residual particles are often observed on transferred graphene, we investigated their origin using scanning electron microscopy and energy-dispersive X-ray spectrometry (EDX). The results show that these residual particles are composed either of silicon or an alloy of a few metals, and hence, likely originate from the quartz tube of the CVD furnace and the impurities contained in the Cu foil. (C) 2016 The Japan Society of Applied Physics