• 文献标题:   Residue-free suspended graphene transferred by perforated template
  • 文献类型:   Article
  • 作  者:   KIM SM, LEE CK, YOON SU, KIM KS, HWANGBO Y
  • 作者关键词:   perforated template, polymeric residue, graphene, suspended membrane
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.1088/1361-6528/ac4664
  • 出版年:   2022

▎ 摘  要

A residue-free transfer method for graphene is proposed in this study, especially for the fabrication of suspended structures. Using perforated polymer templates, graphene can be precisely transferred onto the specific position in the perforated target SiO2/Si substrates without the need for polymer removal and the subsequent thermal annealing process. The surface of the transferred graphene by the proposed method was analyzed and corroborated via Raman spectroscopy, Fourier transform infrared spectroscopy, transmission electron microscopy. The results of these analyses suggest that the graphene surface has no polymeric residues resulting from the transfer process. The proposed method provides a powerful approach for the transfer of 2D materials and it enables the exploitation of their suspended structures for device applications as well as the physical characterizations without worry on the effect of contaminants.