▎ 摘　　要

The modification of the electronic properties of a coverage-dependent graphene layer by nitrogen ions irradiation was investigated using core-level photoemission spectroscopy (CLPES). Here we describe preparation of monolayer and multilayer epitaxial graphene (EG) functionalized by nitrogen ions irradiation with 100 eV to minimize the damage of graphene layer as we annealed up to 1300 K to track the surface property changes using CLPES. As a result, on the monolayer EG, we found that pyridinic nitrogen mainly existed on the surface. On the multilayer EG, we observed the formation of graphitic nitrogen remaining as a major species confirmed using N Is core-level spectra. Through a work function change (Delta Phi) measurement, both systems indicated p-type doping properties with 4.71 (monolayer EG) and 4.87 eV (multilayer EG) of work function values after N-2 ion irradiation. Interestingly, we observed that monolayer EG maintained its p-type doping character, whereas multilayer EG changed the doping character from p-type to n-type as we annealed both systems up to 1300 K due to the discrepancy of the electron charge transfer. We will systematically demonstrate these variations of electronic properties for both monolayer and multilayer EG.