• 文献标题:   Effects of the flow rate of hydrogen on the growth of graphene
  • 文献类型:   Article
  • 作  者:   SHI YG, HAO Y, WANG D, ZHANG JC, ZHANG P, SHI XF, HAN D, CHAI Z, YAN JD
  • 作者关键词:   graphene, crystal growth, morphology, diffusion, mass transfer, chemical vapor deposition
  • 出版物名称:   INTERNATIONAL JOURNAL OF MINERALS METALLURGY MATERIALS
  • ISSN:   1674-4799 EI 1869-103X
  • 通讯作者地址:   Xidian Univ
  • 被引频次:   8
  • DOI:   10.1007/s12613-015-1049-3
  • 出版年:   2015

▎ 摘  要

Graphene samples with different morphologies were fabricated on the inside of copper enclosures by low pressure chemical vapor deposition and tuning the flow rate of hydrogen. It is found that the flow rate of hydrogen greatly influences the growth of graphene. Thermodynamic analysis indicates that a higher flow rate of hydrogen is favorable to the formation of good quality graphene with regular morphology. However, the mass-transfer process of methane dominates the growth driving force. At very low pressure, mass-transfer proceeds by Knudsen diffusion, and the mass-transfer flux of methane decreases as the flow rate of hydrogen increases, leading to a decrease in the growth driving force. At a higher pressure, mass-transfer proceeds by Fick's diffusion, and the mass-transfer flux of methane is dominated by the gas velocity, whose variation determines the growth driving force variation of graphene.