▎ 摘　　要

Predictable and tunable etching of angstrom-scale nanopores in single-layer graphene (SLG) can allow one to realize high-performance gas separation even from similar-sized molecules. We advance toward this goal by developing two etching regimes for SLG where the incorporation of angstrom-scale vacancy defects can be controlled. We screen several exposure profiles for the etchant, controlled by a multipulse millisecond treatment, using a mathematical model predicting the nucleation and pore expansion rates. The screened profiles yield a narrow pore-size-distribution (PSD) with a majority of defects smaller than missing 16 carbon atoms, suitable for CO2/N-2 separation, attributing to the reduced pore expansion rate at a high pore density. Resulting nanoporous SLG (N-SLG) membranes yield attractive CO2 permeance of 4400 +/- 2070 GPU and CO2/N-2 selectivity of 33.4 +/- 7.9. In the second etching regime, by limiting the supply of the etchant, the nanopores are allowed to expand while suppressing the nucleation events. Extremely attractive carbon capture performance marked with CO2 permeance of 8730 GPU, and CO2/N-2 selectivity of 33.4 is obtained when CO2-selective polymeric chains are functionalized on the expanded nanopores. We show that the etching strategy is uniform and scalable by successfully fabricating high-performance centimeter-scale membrane.