▎ 摘 要
Printed graphene microsupercapacitors (MSCs) are attractive for scalable and low-cost on-chip energy storage for distributed electronic devices. Although electronic devices have experienced significant scaling to smaller formats, the corresponding miniaturization of energy storage components has been limited, with a typical resolution of, similar to 30 mu m for printed graphene patterns to date. Transfer printing is demonstrated here for patterning graphene electrodes with fine line and spacing resolution less than 5 mu m. The resulting devices exhibit an exceptionally small footprint (similar to 0.0067 mm(2)), which provides, to the best of our knowledge, the smallest printed graphene MSCs. Despite this, the devices retain excellent performance with a high areal capacitance of similar to 6.63 mF/cm(2) along with excellent electrochemical stability and mechanical flexibility, resulting from an efficient nonplanar electrode structure and an optimized two-step photoannealing method. As a result, this miniaturization strategy facilitates the on-chip integration of printed graphene MSCs to power emerging electronic devices.