▎ 摘　　要

Electron tomography (ET) can be used to determine the shape, and therefore the properties, of an object. It deals with retrieving tridimensional (3D) information from bidimensional (2D) projections of the object under study. While ET has been used widely in biology, its application to the nanoscale world is relatively recent because of the limitations in resolution and aberration of electron microscopes. At atomic scale, classical tomography reconstruction can be replaced by tomography through points reconstruction, that is, the 3D information can be obtained by applying image processing techniques to the projections and by using geometrical models instead of the classical integral approach. In this paper, a methodology for the study of corrugated graphene will be presented. It will be shown how to apply tomographic techniques to the determination of the corrugations in graphene layers with error in 3D location in the range of pm. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4768701]