▎ 摘　　要

A novel resistive-type micro-humidity sensor was constructed from an interdigitated micro-electrode on a flexible polyimide substrate of size 2.0x3.0 mm(2). The humidity-sensing film was composed of a graphene oxide modified with glycidyltrimethylammonium chloride (GO-GTMAC). We investigate the effect of water adsorption on the electrical properties of GO-GTMAC films using the direct current (DC) measurement and alternating current (AC) complex impedance spectroscopy. The micro-humidity sensor was found to have a sensing range of 0.0268 log Omega/%RH, a linearity of R (2)=0.987, a hysteresis of -1.3 +/- 0.2%RH, a response time of 70 s, and a temperature coefficient of 0.50 +/- 0.05%RH/A degrees C.