▎ 摘　　要

We demonstrate multilayered graphene formation from Sic films via pyrolysis in vacuum, where the Sic films with micro-3C and amorphous crystal structures have been grown by hydrogen radical-enhanced chemical vapor deposition. The Raman spectra composed of D, G, and 2D bands indicates multilayered graphene formed by controlling the substrate temperature in the 1250 to 1600 degrees C range and the duration time. We found that criterion parameters of the multilayered graphene such that both the peak intensity ratio of D-band against G-band and full width at half maximum of G-band are mainly dominated by pyrolysis temperature and duration time in vacuum as well as crystallinity of Sic films used. (C) 2009 The Japan Society of Applied Physics