• 文献标题:   Electrical Contact Resistance of Large-Area Graphene on Pre-Patterned Cu and Au Electrodes
  • 文献类型:   Article
  • 作  者:   BLECHA T, ZIVCOVA ZV, SONIA FJ, MERGL M, VOLOCHANSKYI O, BODNAR M, ROUS P, MIZOHATA K, KALBAC M, FRANK O
  • 作者关键词:   graphene, contact resistance, transfer length method, graphenemetal contact
  • 出版物名称:   NANOMATERIALS
  • ISSN:  
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.3390/nano12244444
  • 出版年:   2022

▎ 摘  要

Contact resistance between electrically connected parts of electronic elements can negatively affect their resulting properties and parameters. The contact resistance is influenced by the physicochemical properties of the connected elements and, in most cases, the lowest possible value is required. The issue of contact resistance is also addressed in connection with the increasingly frequently used carbon allotropes. This work aimed to determine the factors that influence contact resistance between graphene prepared by chemical vapour deposition and pre-patterned Cu and Au electrodes onto which graphene is subsequently transferred. It was found that electrode surface treatment methods affect the resistance between Cu and graphene, where contact resistance varied greatly, with an average of 1.25 +/- 1.54 k omega, whereas for the Au electrodes, the deposition techniques did not influence the resulting contact resistance, which decreased by almost two orders of magnitude compared with the Cu electrodes, to 0.03 +/- 0.01 k omega.