• 文献标题:   Field emission from graphene sheets and its application in floating gate memories
  • 文献类型:   Article
  • 作  者:   NASHED R, PAN C, BRENNER K, NAEEMI A
  • 作者关键词:   2d nand, nonvolatile memory, cvd graphene, field emission
  • 出版物名称:   SEMICONDUCTOR SCIENCE TECHNOLOGY
  • ISSN:   0268-1242 EI 1361-6641
  • 通讯作者地址:   Georgia Inst Technol
  • 被引频次:   1
  • DOI:   10.1088/1361-6641/aae626
  • 出版年:   2018

▎ 摘  要

The potential performance of 2D NAND flash with a graphene floating gate (FG) layer is presented. The field enhancement factor for patterned CVD graphene sheets atop a tunneling dielectric is experimentally extracted and used to drive higher-level circuit simulations on 64-bit NAND strings. The average field enhancement factor at a barrier height of 3.1 eV was found to be similar to 2.85 with a maximum value of 4. Our modest extracted beta value explains the contradiction in prior experiments that reported a field enhancement factor of few thousands but only 30%-40% improvement in the write voltage of FG memory devices. Design and operational tradeoffs are benchmarked based on these experimental values and it is shown that 2D NAND programming time and/or programming voltage can be suppressed to 10 ns and 5 V, respectively, based on a 65 nm process node. The onset of read disturbs from the more efficient FG layer are identified and shown to be easily mitigated through error correction code.