▎ 摘　　要

A novel surface acoustic wave humidity measurement device coated with graphene oxide membrane was fabricated. The device has highly sensitive to humidity (above 200 kHz/% RH range from 10% RH to 98% RH) with fast response time both on adsorption and desorption (less than 2 s) and well linearity (R-2 > 0.9), furthermore, it was almost temperature independent (0.5% RH/degrees C). The result proved that GO is highly sensitive to humidity with great performance and promised to develop high-performance humidity sensor.