▎ 摘　　要

In this work, we present studies of the effects of electron-beam irradiation on the modification of single-layer graphene. Micro-Raman spectra show that the D, D', and D + G Raman bands, which are invisible for pristine graphene, appear after the graphenes are irradiated by low-energy electron-beam irradiation (10 keV), and the intensities of these peaks increase with increasing irradiation time, indicating disorder in graphene. The characteristics of G and 2D bands of graphene are also studied before and after irradiation. In the meantime, the height of graphene is studied by atomic force microscopy and found to increase for increasing irradiation time due to the contaminant deposition on graphene. The effects introduced by irradiation can be recovered partly by vacuum annealing. These results provide important information about the modification of graphene under electron-beam irradiation.