• 文献标题:   Flexible integrated circuits and multifunctional electronics based on single atomic layers of MoS2 and graphene
  • 文献类型:   Article
  • 作  者:   AMANI M, BURKE RA, PROIE RM, DUBEY M
  • 作者关键词:   flexible electronic, integrated circuit, mos2, graphene, heterostructure
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Univ Calif Berkeley
  • 被引频次:   33
  • DOI:   10.1088/0957-4484/26/11/115202
  • 出版年:   2015

▎ 摘  要

Two-dimensional materials, such as graphene and its analogues, have been investigated by numerous researchers for high performance flexible and conformal electronic systems, because they offer the ultimate level of thickness scaling, atomically smooth surfaces and high crystalline quality. Here, we use layer-by-layer transfer of large area molybdenum disulphide (MoS2) and graphene grown by chemical vapor deposition (CVD) to demonstrate electronics on flexible polyimide (PI) substrates. On the same PI substrate, we are able to simultaneously fabricate MoS2 based logic, non-volatile memory cells with graphene floating gates, photo-detectors and MoS2 transistors with tunable source and drain contacts. We are also able to demonstrate that these flexible heterostructure devices have very high electronic performance, comparable to four point measurements taken on SiO2 substrates, with on/off ratios > 10(7) and field effect mobilities as high as 16.4 cm(2) V-1 s(-1). Additionally, the heterojunctions show high optoelectronic sensitivity and were operated as photodetectors with responsivities over 30 AW(-1). Through local gating of the individual graphene/MoS2 contacts, we are able to tune the contact resistance over the range of 322-1210 ohm mm for each contact, by modulating the graphene work function. This leads to devices with tunable and multifunctional performance that can be implemented in a conformable platform.