• 文献标题:   Graphene Edge Lithography
  • 文献类型:   Article
  • 作  者:   XIE GB, SHI ZW, YANG R, LIU DH, YANG W, CHENG M, WANG DM, SHI DX, ZHANG GY
  • 作者关键词:   graphene nanoribbons gnrs, edge, nanostructure, atomic layer deposition ald, top gate, electrical transport
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   32
  • DOI:   10.1021/nl301936r
  • 出版年:   2012

▎ 摘  要

Fabrication of graphene nanostructures is of importance for both investigating their intrinsic physical properties and applying them into various functional devices. In this paper, we report a scalable fabrication approach for graphene nanostructures. Compared with conventional lithographic fabrication techniques, this new approach uses graphene edges as the templates or masks and offers advantage in technological simplicity and capability of creating small features below 10 nm scale. Moreover, mask layers used in the fabrication process could be simultaneously used as the dielectric layers for top-gated devices. The as-fabricated graphene nanoribbons (GNRs) are of high quality with the carrier mobility similar to 400 cm(2)/(V s) for typical 15 nm wide ribbons. Our technique allows easy and reproducible fabrication of various graphene nanostructures, such as ribbons and rings, and can be potentially extended to other materials and systems by use of their edges or facets as templates.