• 文献标题:   Direct graphene growth on insulator
  • 文献类型:   Article
  • 作  者:   LIPPERT G, DABROWSKI J, LEMME M, MARCUS C, SEIFARTH O, LUPINA G
  • 作者关键词:   graphene, growth, insulator, mbe
  • 出版物名称:   PHYSICA STATUS SOLIDI BBASIC SOLID STATE PHYSICS
  • ISSN:   0370-1972
  • 通讯作者地址:   Innovat High Performance Microelect
  • 被引频次:   43
  • DOI:   10.1002/pssb.201100052
  • 出版年:   2011

▎ 摘  要

Fabrication of graphene devices is often hindered by incompatibility between the silicon technology and the methods of graphene growth. Exfoliation from graphite yields excellent films but is good mainly for research. Graphene grown on metal has a technological potential but requires mechanical transfer. Growth by SiC decomposition requires a temperature budget exceeding the technological limits. These issues could be circumvented by growing graphene directly on insulator, implying Van der Waals growth. During growth, the insulator acts as a support defining the growth plane. In the device, it insulates graphene from the Si substrate. We demonstrate planar growth of graphene on mica surface. This was achieved by molecular beam deposition above 600 degrees C. High resolution Raman scans illustrate the effect of growth parameters and substrate topography on the film perfection. Ab initio calculations suggest a growth model. Data analysis highlights the competition between nucleation at surface steps and flat surface. As a proof of concept, we show the evidence of electric field effect in a transistor with a directly grown channel. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim