• 文献标题:   Edge Doping in Graphene Devices on SiO2 Substrates
  • 文献类型:   Article
  • 作  者:   VASILYEVA GY, SMIRNOV D, VASILYEV YB, GRESHNOV AA, HAUG RJ
  • 作者关键词:   graphene, edge doping, substrate, defect, plasma etching
  • 出版物名称:   SEMICONDUCTORS
  • ISSN:   1063-7826 EI 1090-6479
  • 通讯作者地址:   Ioffe Inst
  • 被引频次:   1
  • DOI:   10.1134/S1063782619160292
  • 出版年:   2019

▎ 摘  要

The conductivity of single layer and bilayer graphene ribbons 0.5-4 mu m in width fabricated by oxygen plasma etching is studied experimentally. The dependence of the electron concentration in graphene on the ribbon width is revealed. This effect is explained by the edge doping of graphene due to defects arranged in SiO2 near the ribbon edges. The method of the formation of abrupt p-n junctions in graphene and structures with a constant electron concentration gradient in the graphene plane with the help of edge doping is proposed.