• 文献标题:   High-Frequency Flexible Graphene Field-Effect Transistors with Short Gate Length of 50nm and Record Extrinsic Cut-Off Frequency
  • 文献类型:   Article
  • 作  者:   YU C, HE ZZ, SONG XB, LIU QB, GAO LB, YAO B, HAN TT, GAO XD, LV YJ, FENG ZH, CAI SJ
  • 作者关键词:   cutoff frequency, flexible electronic, graphene, transistor
  • 出版物名称:   PHYSICA STATUS SOLIDIRAPID RESEARCH LETTERS
  • ISSN:   1862-6254 EI 1862-6270
  • 通讯作者地址:   Hebei Semicond Res Inst
  • 被引频次:   2
  • DOI:   10.1002/pssr.201700435
  • 出版年:   2018

▎ 摘  要

Flexible graphene field effect transistors (GFETs) are fabricated on a polyimide (PI) substrate by an improved self-aligned fabrication procedure. Short gate length of 50nm is achieved. Ohmic contact resistance is depressed. The prepared GFET shows comparable intrinsic cut-off frequency and maximum oscillation frequency of 116 and 110GHz, respectively. The high frequency of flexible GFET demonstrated here paves the way for applications which require high flexibility and radio frequency operations.