• 文献标题:   Scalable Synthesis of Graphene on Patterned Ni and Transfer
  • 文献类型:   Article
  • 作  者:   WANG YJ, MIAO CQ, HUANG BC, ZHU J, LIU W, PARK Y, XIE YH, WOO JCS
  • 作者关键词:   chemical vapor deposition cvd, graphene, transfer, transistor
  • 出版物名称:   IEEE TRANSACTIONS ON ELECTRON DEVICES
  • ISSN:   0018-9383 EI 1557-9646
  • 通讯作者地址:   Univ Calif Los Angeles
  • 被引频次:   20
  • DOI:   10.1109/TED.2010.2076337
  • 出版年:   2010

▎ 摘  要

We present an approach to mass produce high-quality graphene on insulator substrate. Ni dots with single or few grains were achieved by annealing. Electron backscattered diffraction indicated that almost all of the Ni dots had (111) surface that is parallel to the substrate. Single-layer graphene with good crystalline quality has been grown on Ni dots. The patterned graphene films were transferred to insulating substrates by wafer bonding and etch back technique, which resulted in zero misalignment, low contamination, and high yield (> 90%). Graphene-based field-effect transistors with self-aligned gate were fabricated with this method, which demonstrate the potential of this method as a candidate for mass production of graphene transistors.