• 文献标题:   Growth of large sp(2) domain size single and multi-layer graphene films at low substrate temperature using hot filament chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   SINGH M, JHA HS, AGARWAL P
  • 作者关键词:   graphene, hot filament cvd, raman spectroscopy, sp 2 domain size
  • 出版物名称:   MATERIALS LETTERS
  • ISSN:   0167-577X EI 1873-4979
  • 通讯作者地址:   Indian Inst Technol Guwahati
  • 被引频次:   9
  • DOI:   10.1016/j.matlet.2014.04.066
  • 出版年:   2014

▎ 摘  要

Single, bi and a few layer graphene films of large sp(2) domain size were grown on Ni foil using hot filament chemical vapor deposition at a relatively low substrate temperature of 700 degrees C. The number of layers was found to vary from Ito 6 and 7 to 12 for the films deposited at a process pressure of 1.5 mbar for the deposition time of 30 and 20 min, respectively. Further at a lower process pressure of 1 mbar, 2-8 layers were obtained for 10 min deposition time. The measured average sp(2) domains size was found to be in the range of 117-279 nm in the case of 1-6 layers of graphene films. These large domain size graphene films could be very useful for graphene based electronic devices and other applications. (C) 2014 Elsevier B.V. All rights reserved.