• 文献标题:   Catalyst-free synthesis of few-layer graphene films on silicon dioxide/Si substrates using ethylene glycol by chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   LUO JJ, WANG J, XIA FF, HUANG XT
  • 作者关键词:   graphene, catalystfree, synthesi, field effect transistor, ethylene glycol
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   Cent China Normal Univ
  • 被引频次:   0
  • DOI:   10.1088/2053-1591/aaf491
  • 出版年:   2019

▎ 摘  要

Catalyst-free growth of graphene directly on dielectric substrates is a challenging work for graphene-based electronics. In this paper, a simple method to synthesize large area few layer graphene films on silicon dioxide/Si substrates by chemical vapor deposition is reported. A novel liquid carbon source (ethylene glycol) is used, without any catalysts. The obtained graphene films are characterized by Raman spectroscopy, x-ray photoelectron spectroscopy, atomic force microscopy. The field effect transistor with graphene film as channel material is fabricated, and the carrier mobility is 707 cm(2) V-1 .S-1. This work offers a new strategy to directly grow graphene on silicon dioxide/Si substrates, and the as-synthesized graphene films may have potential applications in sensors, conductive films, electronic devices, etc.