• 文献标题:   Fabrication of high-quality all-graphene devices with low contact resistances
  • 文献类型:   Article
  • 作  者:   YANG R, WU S, WANG DM, XIE GB, CHENG M, WANG GL, YANG W, CHEN P, SHI DX, ZHANG GY
  • 作者关键词:   graphene, allgraphene device, thinning, contact resistance
  • 出版物名称:   NANO RESEARCH
  • ISSN:   1998-0124 EI 1998-0000
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   11
  • DOI:   10.1007/s12274-014-0504-1
  • 出版年:   2014

▎ 摘  要

All-graphene devices are new class of graphene devices with simple layouts and low contact resistances. Here we report a clean fabrication strategy for all-graphene devices via a defect-assisted anisotropic etching. The as-fabricated graphene is free of contamination and retains the quality of pristine graphene. The contact resistance at room temperature (RT) between a bilayer graphene channel and a multilayer graphene electrode can be as low as similar to 5 Omega center dot mu m, the lowest ever achieved experimentally. Our results suggest the feasibility of employing such all-graphene devices in high performance carbon-based integrated circuits.