• 文献标题:   Electron optical characterization of a graphene coated nickel electron source
  • 文献类型:   Article
  • 作  者:   SHAO XY, ANG WK, KHURSHEED A
  • 作者关键词:   low frequency noise, low voltage scanning electron microscopy, boersch effect, cold field emission source, graphene
  • 出版物名称:   JOURNAL OF ELECTRON SPECTROSCOPY RELATED PHENOMENA
  • ISSN:   0368-2048 EI 1873-2526
  • 通讯作者地址:   Natl Univ Singapore
  • 被引频次:   0
  • DOI:   10.1016/j.elspec.2019.06.002
  • 出版年:   2020

▎ 摘  要

Graphene coated nickel electron sources have been recently reported to have significant advantages over state-of-the-art conventional tungsten cold field emission sources for electron microscopy/lithography applications. In this article, noise characteristics and lifetime measurements of a graphene-coated point-cathode emitter are presented in a vacuum chamber with a base pressure of 2x10(-9) Torr. The results show that the emitter is able to operate at a high current density (1 mu A/sr) for 600 h without decay. The energy spread broadening at high emission current density due to mutual coulomb repulsion between the electron-electron interactions (the Boersch effect) was experimentally estimated, and found to increase with greater extraction voltages and decreasing tip sizes. These results provide data from which low energy beam applications can be developed for the cold field graphene coated nickel electron source.