▎ 摘　　要

In this study, we propose a tilted fiber Bragg grating (TFBG) humidity sensor fabricated using the phase mask method to produce a TFBG that was then etched with five different diameters of 20, 35, 50, 55 and 60 mu m, after which piezoelectric inkjet technology was used to coat the grating with graphene oxide. According to the experimental results, the diameter of 20 mu m yielded the best sensitivity. In addition, the experimental results showed that the wavelength sensitivity was -0.01 nm/% RH and the linearity was 0.996. Furthermore, the measurement results showed that when the relative humidity was increased, the refractive index of the sensor was decreased, meaning that the TFBG cladding mode spectrum wavelength was shifted. Therefore, the proposed graphene oxide film TFBG humidity sensor has good potential to be an effective relative humidity monitor.