• 文献标题:   Transfer-free graphene synthesis on sapphire by catalyst metal agglomeration technique and demonstration of top-gate field-effect transistors
  • 文献类型:   Article
  • 作  者:   MIYOSHI M, MIZUNO M, ARIMA Y, KUBO T, EGAWA T, SOGA T
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Nagoya Inst Technol
  • 被引频次:   7
  • DOI:   10.1063/1.4928759
  • 出版年:   2015

▎ 摘  要

Transfer-free graphene synthesis was performed on sapphire substrates by using the catalyst metal agglomeration technique, and the graphene film quality was compared to that synthesized on sputtered SiO2/Si substrates. Raman scattering measurements indicated that the graphene film on sapphire has better structural qualities than that on sputtered SiO2/Si substrates. The cross-sectional transmission microscopic study also revealed that the film flatness was drastically improved by using sapphire substrates instead of sputtered SiO2/Si substrates. These quality improvements seemed to be due the chemical and thermal stabilities of sapphire. Top-gate field-effect transistors were fabricated using the graphene films on sapphire, and it was confirmed that their drain current can be modulated with applied gate voltages. The maximum field-effect mobilities were estimated to be 720 cm(2)/V s for electrons and 880 cm(2)/V s for holes, respectively. (C) 2015 AIP Publishing LLC.