▎ 摘　　要

To characterize the electrical properties of arbitrarily shaped small graphene flakes in a direct way, a kind of cleavage-based micro four probe (C-M4P) is developed and a finite element analysis (FEA)-aided approximation method is subsequently proposed. The cleavage process is put forward in the manufacturing of C-M4Ps, which fulfills the releasing of the C-M4P in an ingenious manner. Specifically, we investigate the cleavage process based on simulation and the scanning electron micrograph (SEM). Furthermore, the FEA-aided approximation method brings new insight into the conductivity characterization of arbitrarily shaped small graphene flakes when the geographic correction factor is non-negligible but complicated to figure out. The electrical properties of monolayer graphene flakes applied with back gate voltage are detected by the C-M4P and analyzed through the FEA-aided approximation method, which are proved to be competent for small graphene flake characterization.