• 文献标题:   Graphene gas pumps
  • 文献类型:   Article
  • 作  者:   DAVIDOVIKJ D, BOUWMEESTER D, VAN DER ZANT HSJ, STEENEKEN PG
  • 作者关键词:   graphene, gas pump, nanomechanic, nems
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Delft Univ Technol
  • 被引频次:   2
  • DOI:   10.1088/2053-1583/aac0a8
  • 出版年:   2018

▎ 摘  要

We report on the development of a pneumatically coupled graphene membrane system, comprising of two circular cavities connected by a narrow trench. Both cavities and the trench are covered by a thin few-layer graphene membrane to form a sealed dumbbell-shaped chamber. Local electrodes at the bottom of each cavity allow for actuation of each membrane separately, enabling electrical control and manipulation of the gas flow inside the channel. Using laser interferometry, we measure the displacement of each drum at atmospheric pressure as a function of the frequency of the electrostatic driving force and provide a proof-of-principle of using graphene membranes to pump attolitre quantities of gases at the nanoscale.