▎ 摘　　要

Physical properties of graphene depend on the number of atomic layers in the film, presence of structural defects and impurities. Low-voltage, aberration-corrected, high-resolution transmission electron microscopy (HRTEM) has proven to be an excellent tool for structure analysis of graphene films. However, experimental observations of graphene films by HRTEM exhibit several challenges due to low contrast and sensitivity of graphene to intense electron beams. While a majority of electron scattering effects in graphene are purely kinematic, the contrast interpretation still requires computer simulations for reliable structure identification. In this paper, we present HRTEM contrast simulations of graphene films based on multislice algorithms and compare them to experimental results. The effects of stacking sequence, number of layers, and presence of impurities have been analyzed in conjunction with imaging conditions. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim