▎ 摘　　要

In this work, transparent and flexible humidity sensors based on graphene oxide film were prepared using the electrostatic spray deposition technique. Graphene oxide (GO) powder was synthesized using the modified Hummer's method, which was used as a precursor for thin-film deposition. The properties of GO films were characterized by X-ray diffraction, field-emission scanning electron microscope, Raman spectroscopy, Fourier transform infrared spectroscopy, and UV-Vis spectrophotometer. The effect of substrate temperature on the sensor properties was observed. The impedance of the device exhibited a lower value when increasing the relative humidity level. In addition, the device showed high sensitivity of more than 1117.3, fast response with 5 s, more than 60% optical transparency, and flexible property more than 2000 cycles. In addition, the equivalent circuit models of the devices were evaluated from complex impedance measurements used to explain the sensing mechanisms of the device.