▎ 摘　　要

Cu nanoparticles decorated CVD growth single layer and 2-3 layers graphene films have been synthesized by sputtering deposition and annealing process. The wrinkles were observed on single layer graphene due to high annealing temperature (700 degrees C) and rapid cooling process, which were proved by HRSEM and Raman spectra. Smaller mean diameter and narrower size distribution of Cu nanoparticles were observed on 2-3 layers graphene film than that on single layer graphene. The large particles grow at the expense of small particles, and the particle growth was governed by the Ostwald ripening process.