• 文献标题:   Synthesis, Transfer, and Devices of Single- and Few-Layer Graphene by Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   DE ARCO LG, ZHANG Y, KUMAR A, ZHOU CW
  • 作者关键词:   cvd, fewlayer graphene, graphene device, graphene synthesi, graphene transfer
  • 出版物名称:   IEEE TRANSACTIONS ON NANOTECHNOLOGY
  • ISSN:   1536-125X EI 1941-0085
  • 通讯作者地址:   Univ So Calif
  • 被引频次:   181
  • DOI:   10.1109/TNANO.2009.2013620
  • 出版年:   2009

▎ 摘  要

The advance of graphene-based nanoelectronics has been hampered due to the difficulty in producing single- or few-layer graphene over large areas. We report a simple, scalable, and cost-efficient method to prepare graphene using methane-based CVD on nickel films deposited over complete Si/SiO2 wafers. By using highly diluted methane, single- and few-layer graphene were obtained, as confirmed by micro-Raman spectroscopy. In addition, a transfer technique has been applied to transfer the graphene film to target substrates via nickel etching. FETs based on the graphene films transferred to Si/SiO2 substrates revealed a weak p-type gate dependence, while transferring of the graphene films to glass substrate allowed its characterization as transparent conductive films, exhibiting transmittance of 80% in the visible wavelength range.