• 文献标题:   Remote plasma-assisted low-temperature large-area graphene synthesis
  • 文献类型:   Article
  • 作  者:   PAE JY, MEDWAL R, VAS JV, MATHAM MV, RAWAT RS
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF VACUUM SCIENCE TECHNOLOGY B
  • ISSN:   2166-2746
  • 通讯作者地址:   Nanyang Technol Univ
  • 被引频次:   3
  • DOI:   10.1116/1.5093241
  • 出版年:   2019

▎ 摘  要

Graphene is typically grown using thermal chemical vapor deposition (CVD) on metallic substrates such as copper and nickel at elevated temperatures above 1000 degrees C. The synthesis of large-area graphene at low temperature is highly desirable for large volume industrial production. In this paper, the authors report a remote plasma-assisted CVD graphene synthesis at a reduced temperature of 600 degrees C in a relatively shorter duration of 15 min. Scanning electron microscopy reveals the formation of large graphene crystal with an approximate size of 100 x 100 mu m(2) over the entire 2 x 10 cm(2) surface of copper foil substrates. Raman spectra recorded for graphene grown at 600 degrees C show the presence of a graphene characteristic "2D" peak, attesting to the formation of graphene. The results show that it is possible to grow horizontal graphene at low temperatures and transfer it to flexible polyethylene terephthalate substrates. The utility of the synthesized graphene is ascertained through the successful fabrication of a flexible graphene-based electrochemical sensor for the detection of glucose concentration. The present research will have a direct impact on flexible wearable biosensors.