• 文献标题:   Large-Scale Graphene on Hexagonal-BN Hall Elements: Prediction of Sensor Performance without Magnetic Field
  • 文献类型:   Article
  • 作  者:   JOO MK, KIRN J, PARK JH, NGUYEN VL, KIM KK, LEE YH, SUH D
  • 作者关键词:   graphene, hexagonal boron nitride, magnetic field sensor, largearea graphene device, graphene hall element, chemical vapor deposition
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:   Inst Basic Sci
  • 被引频次:   11
  • DOI:   10.1021/acsnano.6b04547
  • 出版年:   2016

▎ 摘  要

A graphene Hall element (GHE) is an optimal system for a magnetic sensor because of its perfect two-dimensional, (2-D) structure, high carrier mobility, and widely tunable carrier concentration. Even though several proof-of-concept devices have been proposed, manufacturing them by mechanical exfoliation of 2-D material or electron-beam lithography is of limited feasibility. Here, we demonstrate a high quality GHE, array having a graphene on hexagonal-BN (h-BN) heterostructure, fabricated by photolithography and large-area 2-D materials grown by chemical vapor deposition techniques. 11 superior performance of GHE was achieved with the help of a bottom h-BN layer, and showed a maximum current-normalized sensitivity of 1986 V/AT, a minimum magnetic resolution of 0.5 mG/Hz(0.5) at f = 300 Hz, and an effective dynamic range larger than 74 dB. Furthermore, on the basis of a thorough understanding of the shift of charge neutrality point depending on various parameters, an analytical model that predicts the magnetic sensor operation of a GHE from its transconductance data without magnetic field is proposed, simplifying the evaluation of each GHE design. These results demonstrate the feasibility of this highly performing graphene device using large-Scale manufacturing-friendly fabrication methods.