▎ 摘　　要

As graphene grows on a metal substrate, step bunching and terrace formation occur due to thermodynamic instability. Variation in the terrace-step bunching morphology is caused by graphene-metal interaction. The mechanism for this morphological variation was elucidated in terms of the crystal lattice matching by the observation of step bunching formation using in situ scanning electron microscopy and analysis of the crystal orientation of the same microscopic field using electron backscatter diffraction. The cross-sectional structure was also observed using transmission electron microscopy (TEM). These combined methods enable a reliable analysis of the step bunching region. The lattice matching was also evaluated according to the 0-lattice theory. From the structural analysis using TEM and the application of the 0-lattice theory, the graphene-covered surface was confirmed to consist of good and poor lattice-matching regions. The steps ejected from the terrace region piled up in the poor lattice-matching region to form a low Miller index plane. It was concluded that step flow occurs on the good lattice-matching region and steps are piled up and arranged very closely on the poor matching region based on the lattice-matching evaluation by the 0-lattice theory.