• 文献标题:   Enhanced resistive switching performance of TiO2 based RRAM device with graphene oxide inserting layer
  • 文献类型:   Article
  • 作  者:   HU LF, ZHENG Z, XIAO M, MENG QS
  • 作者关键词:   graphene oxide, tio2, resistive switching, conductive filament, sclc
  • 出版物名称:   SEMICONDUCTOR SCIENCE TECHNOLOGY
  • ISSN:   0268-1242 EI 1361-6641
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1088/1361-6641/acc2df
  • 出版年:   2023

▎ 摘  要

In this work, graphene oxide (GO)/TiO2 heterostructures for resistive random access memory devices were fabricated, and the composition and microstructure of TiO2 and GO were characterized by x-ray diffraction, Raman spectroscopy, scanning electronic microscopy, and transmission electron microscopy. The resistive characteristics of the fabricated devices were investigated, and the remarkable improvement in cycle-to-cycle uniformity and high ON/OFF ratio of the TiO2 thin film-based memory device were realized by introducing a thin GO layer. The formation/rupture of the conductive filament through the migration of oxygen vacancies in the TiO2 substrate was responsible for the resistive switching. Owing to the different activation energies of reduction and oxidation of the GO, the set voltage became larger than the reset voltage. According to the linear fitting of double logarithm I-V plots, the conduction mechanism in low and high resistance states was governed by the ohmic mechanism and trap-controlled space charge limited current, respectively. The oxygen migration-induced oxidation/reduction in GO rendered it a good oxygen vacancy reservoir, which is responsible for the enhanced cycle-to-cycle uniformity and high ON/OFF ratio.