• 文献标题:   Abnormal Grain Growth for Single-Crystal Cu Substrate and Chemical Vapor Deposition of Graphene on It
  • 文献类型:   Article
  • 作  者:   NAM J, LEE I, LEE DY, KIM M, KIM KS
  • 作者关键词:   abnormal grain growth, single crystal, chemical vapor deposition, graphene, carrier mobility, 68, 55, jk, 68, 65, pq, 73, 61, r, 81, 10
  • 出版物名称:   JOURNAL OF THE KOREAN PHYSICAL SOCIETY
  • ISSN:   0374-4884 EI 1976-8524
  • 通讯作者地址:   Sejong Univ
  • 被引频次:   1
  • DOI:   10.3938/jkps.76.923
  • 出版年:   2020

▎ 摘  要

In this study, we optimized the condition for forming a single-crystal (111) Cu substrate by using polycrystalline Cu and an abnormal grain growth method. As a result, a single-crystal (111) Cu surface could be formed through annealing for 2 hours in an H-2(100 sccm) and Ar (200 sccm) gas atmosphere (pressure 70 Torr) at 1050 degrees C. The crystallinity of the Cu-surface was confirmed by using X-ray diffraction analysis and electron backscatter diffraction (EBSD) pattern imaging and mapping. In addition, chemical vapor deposited graphene was synthesized before and after the crystallinity control of the substrate, and then transferred onto an SiO2(300 nm)/Si substrate to perform a Raman spectral analysis and to evaluate the electrical properties through graphene field effect transistor device fabrication. In particular, the mobility of graphene grown on polycrystalline Cu is mu(h)= 1228 (mu(e)= 1158) cm(2)center dot V-1 center dot s(-1)while the carrier mobility of graphene synthesized on a single-crystal Cu surface is mu(h)= 3353 (mu(e)= 3200) cm(2)center dot V-1 center dot s(-1), showing an improvement of about 273% (276%). Such a single-crystal substrate can be widely used for the synthesis of high-quality 2-dimensional materials and can be reused after the material has been transferred by using a metal etching-free transfer method.